In this paper we describe the theoretical foundations, for- mal considerations, and technical characteristics that were taken into account for the conceptualization of a modeling language for the semantic annotation of visual models. Thereby it is envisaged to give insights into the underlying processes for the development of new visual modeling languages and thus provide input for a future model of the conceptualization process. To illustrate the realization of the approach we revert to the semantic annotation of a business process model using concepts from the web ontology language OWL, which allows us to show the iterations that were conducted to develop the approach. As a fi�rst evaluation the approach has been implemented on a meta modeling platform and will be made freely available to the interested community in the course of the SeMFIS project on www.openmodels.at.

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